Equipment: Axcelis NV6200A S/N 763
Year of fabrication: 1990/95
Wafer : 6 Inch
End Station Hight Reliability
Historic Equipment:
This Equipment was designed and produced by one of the large American semiconductor equipment manufacturers: EATON / AXCELIS.
This manufacturer established in the United States with more than 45 years of existence remains a leader in its field with innovations
Produced in Texas in the 1990s, the 6200A model offers an automated and reliable version.
This equipment is part of the latest versions offering the maximum upgrade for better reliability and better performance.
The model for sale is in exceptional condition since it has only been used a little in an R&D factory. This equipment has never been used in continue on semiconductor factory where all machine are working 24 h per day 7 days a week and where the maintenance is made bay many people.
Its maintenance has always been carried out by engineers from the Axcelis Company in compliance with the rules and in accordance with the procedures and specification.
Purchased in 2017 by the company IBEAMSC, it was stored and used as a test and demonstration machine for training
This equipment is widely acclaimed by research centers and small production units for its price ease of use, large dose range versatility (5 to 200 KV installation), and precision and low maintenance costs.
Features:
Available in 6 inch version
Gaz box 4 lines ( for LBX bottle , 0.4 l)
External gaz box 2 lines
High Reliability End Station ( new design of arms , sensors ect.. for better transfert wafer reliability
See Specification sheet